利用等离子体辅助真空电弧沉积技术,在高速钢和单晶硅基体上制备Zr-Cu-N复合薄膜.采用X射线衍射仪(XRD)、扫描电镜(SEM)和超微显微硬度计研究了低能氮离子束流对Zr-Cu-N涂层结构、表面形貌和硬度的影响.结果表明:用低能氮离子束辅助真空电弧沉积Zr-Cu-N膜,ZrN结构在(111)晶面出现择优取向,并对Zr-Cu-N膜层有一定的强化作用,膜层表现出较高的显微硬度和转好的耐磨性能.
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