随着微/纳米技术的发展,在微/纳尺度器件中金属材料的几何尺度或微观结构尺度从宏观尺度逐渐减小到微米、亚微米甚至纳米量级,其室温电阻率往往表现出明显的尺寸效应.本文总结了近年来关于不同尺度金属材料电阻率的研究进展,重点介绍了金属材料的微观结构、缺陷尺度以及几何尺度对金属材料电阻率的影响及相关的理论模型,探讨了材料内部微观结构尺度与几何尺度对材料导电性能的影响规律.最后,对微尺度金属材料电阻率及其服役可靠性的研究趋势进行了展望.
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