采用溶胶-凝胶工艺在p+-Si基片上制备了La0.67Ca0.33MnO3薄膜,构建了Ag/La0.67Ca0.33MnO3/p+-Si三明治结构的阻变器件,研究了器件的电致阻变性能.结果表明:Ag/La0.67Ca0.33MnO3/P+-Si器件具有明显的双极性阻变特性,其高阻态(HRS)与低阻态(LRS)比(HRS/LRS)高于104,器件在高阻态和低阻态的电荷传导机制分别遵循Schottky势垒导电机制与空间电荷限制电流机制(SCLC).器件在2×103次可逆循环测试下,高、低阻态比无明显变化,表现出良好的抗疲劳特性.根据器件的高、低阻态阻抗谱,可以得到阻变效应是由器件界面的肖特基势垒的改变与器件内部缺陷填充共同作用的.
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