利用飞秒激光在空气中对单晶硅进行扫描刻蚀,在硅表面形成一系列平行的刻蚀槽,刻蚀槽底部为密集排列的微纳米颗粒.这种微纳米结构使得硅表面在各角度都呈现黑色,同时这种微纳米结构降低了硅材料的反射率,提升了硅材料的光吸收能力.本文通过对单晶硅表面进行不同能量密度的飞秒激光辐照,发现这种降低硅表面反射率的微纳米结构的形成和其单位面积上受到辐照的激光能量密度有直接关系,过高和过低的激光通量都不利于微纳米结构的产生.
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