采用研磨-机械抛光-化学机械抛光工艺对CdZnTe(211)面进行加工,当表面粗糙度Ra达到0.94 nm时,采用纳米压痕仪对CdZnTe(211)面进行纳米力学性能测量,试验结果表明:弹性模量和硬度随着压力的增大而减小,存在明显的尺寸效应.当针尖离开晶体表面时,黏附现象特别明显.在不同晶向上,弹性模量和硬度存在显著的各向异性.
The process of lapping, mechanical polishing and chemical mechanical polishing was used to machine the CdZnTe (211) face, when the surface roughness Ra was 0.94 nm, nano indenter was employed to measure the mechanical properties of CdZnTe (211) face, the experimental results show that the hardness and elastic modulus decrease as the indention load increasing, which is obvious the size effect. When the nanoindenter departs the crystal surface, the adherence effects are obvious. Strong anisotropy of the hardness and elastic modulus is shown on different crystallographic direction.
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