采用液相沉积法(LPD)制备二氧化钛薄膜,探索pH值对二氧化钛薄膜样品成份、结构和性能的影响,利用XRD、FESEM、UV等方法对薄膜的结构、形貌以及光学特性进行表征.结果表明LPD制备的二氧化钛薄膜为锐钛矿相,可见光透过率高达80％,具有明显的(004)取向;薄膜的结构和光学特性依赖沉积液pH值,pH=2.03时所制备的薄膜取向性最佳,柱状晶粒排列整齐.
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