退火对TbCo薄膜结构和磁性能的影响

稀有金属材料与工程, 2003, 32(5): 361-363.

退火对TbCo薄膜结构和磁性能的影响

许小红 ^1, , 李佐宜 ^2, , 段静芳 ^3, , 张晋芳 ^4, , 黄致新 ^5, , 林更其 ^6,

1.华中科技大学,湖北,武汉,430074;山西师范大学,山西,临汾,041004

2.华中科技大学,湖北,武汉,430074

3.山西师范大学,山西,临汾,041004

4.华中科技大学,湖北,武汉,430074

5.华中科技大学,湖北,武汉,430074

6.华中科技大学,湖北,武汉,430074

基金项目: Foundation of Natural Science of Shanxi Province

关键词：退火 , 磁性能 , TbCo薄膜

Effect of Annealing on Magnetic Properties and Structures of TbCo Thin Films

Keywords： annealing , magnetic properties , TbCo thin films

研究了真空退火对 TbCo薄膜结构和磁性能的影响.结果表明:薄膜从溅射态的非晶薄膜转化为退火态的微晶薄膜,并以( 100)面择优取向,其 c轴平行于基片.在真空退火不改变 TbCo薄膜的成分的条件下,发现 TbCo薄膜从溅射态的垂直磁化膜转化为退火态的面内膜.

The magnetic properties and structures of sputtered and annealed TbCo thin films have been studied. The results show that the film will be changed from the amorphous to the polycrystalline, and oriented with (100) plane. The contents of Tb and Co for the film are not almost changed after vacuum annealing, and a change of the easy axis of the film from out-of-plane to in-plane is found.

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