采用溶胶-凝胶法制备了Ag/Mg0.2Zn0.8O/ITO异质结,研究了溶胶浓度对Mg0.2Zn0.8O薄膜生长行为、阻变性能和疲劳特性等的影响.研究表明:Mg0.2Zn0.8O为多晶薄膜,平整致密,且随溶胶浓度的增加结晶度逐步增强,但溶胶浓度过大会导致裂纹产生.阻变行为表明,随着溶胶浓度的增加,Vsct电压逐渐升高,高阻态的阻值(RHRS)逐渐下降,低阻态的阻值(RLRS)无明显变化,RHRs/ RLRS和无疲劳循环次数逐渐降低.不同溶胶浓度所制备Ag/Mg0.2Zn0.8O/ITO异质结遵循相同的导电机制,但低压区域遵循欧姆传导机制的范围有所不同,浓度为0.3 mol/L的薄膜具有较好的综合性能,其Vset低至1.2V、无疲劳循环次数达到230次、RHRs/ RLRS大于10.
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