铜基体上CVD金刚石厚膜的制备

无机材料学报, 2004, 19(4): 958-960.

铜基体上CVD金刚石厚膜的制备

马丙现 , 姚宁 , 杨仕娥 , 高关胤 , 张兵临

郑州大学物理工程学院郑州 450052

Institute of Physics Engineering

Zhengzhou University

Zhengzhou 450052 China

关键词： CVD , thick diamond film , copper substrate

Preparation of Thick CVD Diamond Film on Copper Substrate

MA Bing-Xian , YAO Ning , YANG Shi-E , GAO Guan-Yin , ZHANG Bing-Lin

Keywords： CVD , 金刚石厚膜 , 铜基体

用MWCVD方法在无预处理铜基体上获得了金刚石薄膜和厚膜。所得金刚石膜从基体上自动脱落,但形貌分析和Ramman分析表明,所得金刚石膜具有较好的质量。因此铜是制备金刚石厚膜的理想基体材料。

Diamond thin and thick films were prepared on clean copper substrates by a MWCVD method. The films automatically come off from copper substrates owing to weak adhesion. But micrograph and Ramman spectroscopy show that the films have higher nucleation density and higher quality. These indicate that copper is an ideal substrate for the preparation of thick diamond films.

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