多弧离子镀方法在15-5PH不锈钢材料表面制备结合力、硬度和致密性高的TiN涂层，提高材料表面硬度和抗高温氧化性能。分析结果显示过渡层成分、预热温度、工作气压及负偏压等主要参数对膜层性能影响明显。得到Ti为过渡层时，预热250℃，气压3．0Pa，600V偏压镀膜工艺参数最佳，制备的膜基结合力高于60N，表面硬度〉1200HV0.05，膜层表面大液滴密度尺寸最低。膜层表面显微硬度、膜层沉积速率和膜基结合力随工作气压升高不同程度地先升高后降低。
The multi-arc ion plating technique was adopted to deposit high quality TiN film on 15-SPH stainless steel substrate in order to improve the performance of suhstrate, such as the surface hardness and the high-temperature oxida- tion resistance. The results showed that the interlayer composition, the preheating temperature, the working pressure and the negative bias all had significant influence on the film properties. The adhesive force between the coating layer and the matrix was about 60N, the surface hardness was more than 1200 HV0.05, and the film had the lowest drop den- sity when using Ti as the interlayer under a preheating temperature of 250℃, a working pressure of 3.0Pa, and a nega- tive bias of 600V. With the increase of the working pressure, the surface hardness, the depositing rate and the adhesive force all increased first and then decreased in different degree.
参考文献
| [1] | 隆文庆.某大型环轧件用0Cr15Ni5Cu2Ti钢大规格棒材研制[J].特钢技术,2008(01):26-29. |
| [2] | 钟平,夏明赟,王俊丽,黄万胜,杨根林,王丽.时效对0Cr15Ni5Cu2Ti钢微观组织与力学性能的影响[J].航空材料学报,2003(04):21-25. |
| [3] | 刘建华,李明,陶斌武,李松梅.0Cr15Ni5Cu2Ti钢的高温氧化行为[J].航空学报,2008(01):221-226. |
| [4] | 苏宇辉,董小虹,黄拿灿,黎炳雄,吴欣,朱广宇,李亚军,张中弦.高结合力工模具TiN涂层的制备[J].机电工程技术,2004(05):31-33. |
| [5] | 马峰,蔡珣.膜基界面结合强度表征和评价[J].表面技术,2001(05):15-19. |
| [6] | 龚海飞,邵天敏,王喜眉.温度对TiN/Ti多层膜微观结构和氧化行为的影响[J].中国表面工程,2009(05):20-25. |
| [7] | 毛延发;宫永辉;杨琳 等.[J].内蒙古民族大学学报,2007,22(05):514-517. |
| [8] | 马胜利,李雁淮,徐可为.脉冲电压幅值对等离子体化学气相沉积TiN薄膜膜基结合行为的影响[J].金属学报,2000(01):77-80. |
| [9] | 王福贞;马文存.气象沉积应用技术[M].北京:机械工业出版社,2006:106. |
| [10] | 宫秀敏,叶卫平,孙伟,许大庆,朱小清.TiN多弧离子镀涂层质量与X射线衍射图谱[J].金属热处理,2000(07):32-35. |
| [11] | Li Chunming;Shi Xinwei;Qiu Wanqi et al.[J].Journal of Functional Materials,2004,35:3165-3170. |
| [12] | 徐新乐.多弧离子镀用于制备高质量的Ti-N膜[J].材料保护,2000(08):28-30. |
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