采用分子动力学模拟方法研究了入射角度对Ar+与SiC样品表面相互作用的影响.由模拟结果可知,入射角度对样品原子溅射影响很大.随着入射角度的增大,Si原子和C原子的溅射量先增加后减小.相同入射角度下,Si原子的溅射阈值比C原子的小,Si原子的溅射量大于C原子的溅射量.初始样品在Ar+以不同角度轰击2000次后的形貌各异.产物中主要以Si原子和C原子为主,有少量的Si类和C类产物.入射角度对产物Si原子的角度分布几乎没有影响,而对产物C原子的角度分布有较小的影响.
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