通过改变氧化铍基体的预处理方法,研究了热丝化学气相沉积系统中金刚石薄膜与氧化铍基体的结合情况,及其对导热性能的影响.分别利用金相显微镜和扫描电镜观察薄膜的剥落程度和其表面形貌,利用激光热物性测试仪测量基体和金刚石膜/氧化铍复合体的热扩散系数,并计算其热导率.实验结果表明:水磨砂纸研磨和氢氟酸处理均能有效提高金刚石薄膜与基体的结合情况;氢氟酸处理时间10 min时可得到致密连续、表面均匀的金刚石薄膜,此时复合体的热导率较原来的氧化铍基体可提高31.4%.
Diamond thin films were deposited on beryllia substrates by hot-filament chemical vapor deposition to study the effect of substrate pre-treatment on the thermal properties. The surface details were investigated by metallographic microscope and scanning electronic microscope, while the thermal conductivity of BeO and-dia-mond/BeO was detected by laser-diathermometer. The results show that both of the water-proof abrasive paper and HF pre-treating substrates can improve the continuity of diamond films. When the substrates are eroded by HF for 10 min, the compact and continuous diamond thin film with uniform surface can be obtained, and the thermal conductivity of the composite can be improved by 31.4% compared with original BeO.
参考文献
| [1] | Sarma KH;Fourcade J;Lee SG;Solomon AA .New processing methods to produce silicon carbide and beryllium oxide inert matrix and enhanced thermal conductivity oxide fuels[J].Journal of Nuclear Materials: Materials Aspects of Fission and Fusion,2006(1/3):324-333. |
| [2] | Gorbunova MA;Shein IR;Makurin YN;Kliko VS;Lvanovskii AL .Electronic and magnetic properties of beryllium oxide with 3d impurities from first-principles calculations[J].Physica, B. Condensed Matter,2007(1/2):47-52. |
| [3] | Young TF .Fabrication and thermal analysis of a copper/diamond/copper thermal spreading device[J].Surface & Coatings Technology,2007(4/7):1208-1213. |
| [4] | 王天旭,蒙继龙,文命清.化学气相沉积金刚石薄膜衬底的研究进展[J].金属热处理,2002(09):16-18. |
| [5] | ZHOU Ling-ping,SUN Xin-yuan,LI Shao-lu,LI De-Yi,CHEN Xiao-hua.Mechanism and prediction of failure of diamond films deposited on various substrates by HFCVD[J].中国有色金属学会会刊（英文版）,2004(z1):229-233. |
| [6] | E.A. Ekimov;N.V. Suetin;A.F. Popovich .Thermal conductivity of diamond composites sintered under high pressures[J].Diamond and Related Materials,2008(4/5):838-843. |
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