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采用基于密度泛函理论和广义梯度近似的第一性原理研究了立方相LaAlO3中不同价态氧空位的电子性质.结果表明,氧空位的存在会在立方相LaAlO3的禁带中引入缺陷能级,在氧缺失的条件下,氧空位在立方相LaAlO3中是稳定存在的.随着费米能级位置的改变,具有0价和+2价的氧空位分别为最稳定的电荷状态.LaAlO3中的氧空位具有负U性质,当空位进入到氧化物中时,氧空位会俘获2个空位,达到稳定状态.因此,在LaAlO3高k栅介质中,氧空位为主要俘获电荷的陷阱.

参考文献

[1] Mao LF;Wang ZO .First-principles simulations of the leakage current in metal-oxide-semiconductor structures caused by oxygen vacancies in HfO2 high-K gate dielectric[J].Physica Status Solidi, A. Applied Research,2008(1):199-203.
[2] Segall MD.;Lindan PJD.;Probert MJ.;Pickard CJ.;Hasnip PJ.;Clark SJ. Payne MC. .First-principles simulation: ideas, illustrations and the CASTEP code[J].Journal of Physics. Condensed Matter,2002(11):2717-2744.
[3] Boudali, A;Amrani, B;Khodja, MD;Abada, A;Amara, K .First-principles study of structural, elastic, electronic, and thermal properties of LaAlO3 perovskite[J].Computational Materials Science,2009(4):1068-1072.
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