采用溶胶-凝胶工艺在碱催化条件下制备了多孔结构的纳米SiO2薄膜,研究了不同醇硅比对溶胶体系的粒度分布、薄膜折射率以及透过率的影响。用纳米粒度分析仪测试了溶胶的颗粒分布,用紫外-可见-近红外分光光度计、椭偏仪、原子力显微镜（AFM）、扫描电子显微镜（SEM）测试了薄膜的光学性能、折射率、膜厚和显微形貌等。结果表明：随着醇硅比的增大,溶胶体系粘度下降,凝胶时间延长,颗粒度下降,折射率有升高的趋势;制备的增透玻璃膜层折射率为1.24,可见光透过率达到98.22%。
Silica sol was prepared using TEOS as precursor and ammonia as catalyst by sol-gel process.Effects of EtOH/TEOS molar ratio on the particle size distribution,refractive index and transmission were analyzed in this paper.Distribution of sol particles was tested by nano-particle size analyzer.The transmittance,refractive index,thickness of the obtained coatings were analyzed by UV-visible-near infrared spectrophotometry,ellipsometry,respectively,and the morphology was observed by atomic force microscopy（AFM） and scanning electron microscopy（SEM）.The results show that the viscosity of the sol reduces with the increasing of EtOH/TEOS molar ratio,and the refractive index gradually increases while the particle size decreases.The anti-reflective glass having a coating with a refractive index of 1.24 and a visible light transmittance of 98.22% was prepared successfully.
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