以Ba(OH)2溶液为电解液,分别采用交/直流源微弧氧化技术在工业纯钛板表面沉积BaTiO3薄膜,并对薄膜的物相组成、表面形貌及铁电性能进行了表征.结果表明:直流源和交流源模式下沉积的BaTiO3薄膜分别主要由四方相和六方相构成；薄膜表面均匀散布有孔径为几百纳米至几微米的孔洞,且存在裂纹；六方相BaTiO3薄膜需经长时间高温退火才可生成具有铁电性能的四方相BaTiO3,而直流源微弧氧化可直接生成BaTiO3铁电薄膜.
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