针对掺氮N型纳米金刚石薄膜独特的结构特征，采用温和的电化学阴极表面极化处理成功实现了掺氮N型纳米金刚石薄膜的表面氢化。通过X射线光电子能谱（XPS）、表面接触角、电化学电容一电压分析、Raman光谱、扫描电子显微镜（SEM）表征，详细分析了阴极极化处理前后掺氮N型纳米金刚石薄膜的表面结构以及微观结构。结果表明，该阴极极化处理工艺不仅能够成功获得表面氢终止状态，而且对薄膜的微观结构尤其是晶界处sp2杂化态碳相无明显影响，说明该工艺是一种高效无损的掺氮N型纳米金刚石薄膜表面氢化工艺。
The based on its unique structural feature, nitrogen-doped N-type nanocrystalline diamond thin film was successfully hydrogenated in surface via a mild electrochemical cathode polarization. Surface structure and micro-structure of nitrogen-doped N-type nanocrystalline diamond thin film before and after the treatment of electrochemical cathode polarization were carefully investigated by X-ray photoelectron spectrum （XPS）, con- tact angle measurement, capacitance-voltage analysis, Raman spectrum and scanning electron microscopy （SEM）. These results suggested that this electrochemical cathode polarization technique could not only obtain hydrogen-terminated surface, but also had not significant effect on micro-structure of diamond thin film, espe- cially on sp2-hybridized carbon located in grain boundary, indicating that this technique is an effective and un- damaged surface-hydrogenation method for nitrogen-doped N-type nanocrystalline diamond thin film.
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