随着高新技术的迅速发展，许多研究对象已进入亚微米和纳米范畴。在对这些对象的热性能和热可靠性的研究中，亚微米尺度的热物性测量已成为关键技术之一。例如：在微电子、微电子机械系统(MEMS)领域中，已使用纳米量级厚度的材质和做出纳米尺度线宽的器件。在材料科学、生物学、医学和化学等许多领域，高空间分辨率下的热物性测量也具有重要意义。
The application of scanning thermal microscope (SThM) in measurements of the thermal conductivity distribution, and then, the non-uniformity of materials on a micro-scale has been discussed. The thermal image obtained by SThM showed the thermal conductivity contrast of a silicon-silicon dioxide sample on a micrometer scale. The principle used to measure the thermal diffusivity and conductivity with high lateral resolution by SThM is proposed.
参考文献
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