探讨Ni-AlN复合膜和渐变Ni-AlN选择性吸收涂层的中频溅射技术.结果表明:随着镍靶电流增加和铝靶电流减小,铝靶溅射由金属模式向反应模式转变对应的临界氮气流量降低,制备的Ni-AlN复合膜中镍含量增加,铝含量和氮/铝原子比减少,更容易产生游离铝.随着单层复合材料吸收层沉积时间的增加,Ni-AlN选择性吸收涂层由梯度渐变结构变成多层膜结构,在可见光范围的反射率降低;当单层复合材料吸收层沉积时间为10 min时,Ni-AlN选择性涂层在可见光范围的反射率约为10%,具有良好的光谱选择性.
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