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采用大功率、高重复频率、准分子激光溅射热解石墨靶制备了类金刚石膜,研究了直流辉光氢等离子体处理对类金刚石膜的场发射性能的影响.结果表明:氢等离子体处理后,类金刚石膜的场发射性能明显提高,其发射阈值电场由26 V/μm下降到19 V/μm.氢等离子体刻蚀除去了类金刚石膜生长表面的富含石墨的薄层,露出的新表面具有较低的功函数;膜表面的悬键被氢原子饱和,进一步降低了电子亲和势,改善了膜的场发射性能.

参考文献

[1] Poa CHP;Silva SRP;Lacerda RG;Amaratunga GAJ;Milne WI;Marques FC .Effects of applying stress on the electron field emission properties in amorphous carbon thin films[J].Applied physics letters,2005(23):2102-1-2102-3-0.
[2] D. S. Mao;X. H. Liu;X. Wang;W. Zhu .Electron field emission from diamond-like carbon films and a patterned array by using a Ti interfacial layer[J].Journal of Applied Physics,2002(6):3918-3921.
[3] Li JJ;Gu CZ;Peng HY;Wu HH;Zheng WT;Jin ZS .Field emission properties of diamond-like carbon films annealed at different temperatures[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2005(1/4):236-241.
[4] van der Weide J;Nemanich R J .Schottky barrier height and negative electron affinity of titanium on(111)diamond[J].Journal of Vacuum Science and Technology B:Microelectronics and Nanometer Structures,1992,10:1940.
[5] 茅东升 .无氢非晶金刚石薄膜的制备及其电子场发射性能研究[D].中国科学院上海冶金研究所,2000.
[6] PENG Hongyan,SHEN Jiajing,YANG Guilong.Study of Nanocrystalline Diamond Film Deposited Rapidly by 500 W Excimer Laser[J].中国激光(英文版),2000(03):201-205.
[7] Satyanarayana B S;Hart A;Milne W I et al.Field emission from tereahedral amorphous carbon[J].Applied Physics Letters,1997,71:1430-1432.
[8] 彭鸿雁,金曾孙,李俊杰,申辉,赵立新,申家镜.高功率准分子激光沉积类金刚石膜的结构及性能[J].高等学校化学学报,2003(11):2048-2050.
[9] Peng Hong-yan;Zhao Li-xin;Jin Zeng-sun;el al .Microstructures and properties of the diamond-like films prepared by PLD process using high power high frequency 308 nm laser beam[J].Journal Materials Science Forum,2005,475-479:3631-3634.
[10] 彭鸿雁,周传胜,赵立新,金曾孙,张冰,陈宝玲,陈玉强,李敏君.激光功率密度对类金刚石膜结构性能的影响[J].物理学报,2005(09):4294-4299.
[11] Lifshitz Y;Lempert G D;Grossman E .Substantiation of subplantation model for diamondlike film growth by atomic force microscopy[J].Physical Review Letters,1994,72:2753.
[12] 姚东升.脉冲激光烧蚀淀积类金刚石膜及其成膜机理研究[M].合肥:中国科学技术大学,1999:79.
[13] Davis CA.;Knowles KM.;Amaratunga GAJ. .Growth mechanism and cross-sectional structure of tetrahedral amorphous carbon thin films[J].Physical review letters,1998(15):3280-3283.
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