采用FCVA方法制备厚度分别为50nm、30nm、10nm、5nm、2nm的DLC薄膜,利用可见光拉曼光谱分析薄膜的G峰位置、Id/g和Ag/Ad,发现随着薄膜厚度的减小,Id/Ig不断增大,AgAd减小,G峰位置向低波数方向移动.紫外拉曼光谱分析结果表明,薄膜厚度减薄会减小It/Lg使T峰位置向高波数方向移动.结合两种不同波长的拉曼光谱进行分析,G峰偏移量随薄膜厚度减小呈下降趋势;随薄膜厚度的减小,FCVA法制备的类金刚石薄膜中的sp3键含量减少,同时有序化的sp2团簇增加.EELS结果也证实,薄膜厚度的减小会减少薄膜中sp3键的含量.对于50nm和30nm的非晶碳膜,拉曼光谱分析的结果与薄膜硬度和内应力实际测试结果存在一致的对应关系.
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