Capacitive humidity sensors were made of nanometer barium titanate. The pellets were prepared under different pressures between 3920N to 7850N force. The capacitance changes in three orders of magnitude in the relative humidity range of 10% ～ 98%, indicating high humidity sensitivity of the sensors. At a certain measuring frequency, the capacitance of the sensors increases as increasing of the preparation pressure, while the sensitivity of the sensors basically remains the same. The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity. At a certain humidity, the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.
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