纳米压痕方法具有高的载荷-位移分辨率,不仅能测量出薄膜材料的各种力学性能,还能在实验中反映出块状材料内部晶体学缺陷的变化规律、相变特征,已经成为从原子量级到微米级研究材料各种性能的重要表征手段.介绍了纳米压痕方法在材料研究中的应用,在此基础上提出了纳米压痕方法研究中存在的问题,并展望了其前景.
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