以紫铜为基体,在紫铜上先采用磁控溅射技术镀一层金属钛,再以H2和CH4作为反应气体,采用热丝化学气相沉积法(HFCVD)在钛过渡层上合成金刚石薄膜,研究不同钛过渡层厚度对金刚石薄膜质量的影响.利用X射线(XRD)、激光拉曼光谱(Raman)、扫描电镜(SEM)分析薄膜的结构、成分和表面形貌,用能谱仪(EDS)对热处理前后样品的表面进行了元素分析.研究发现,当钛过渡层厚度为3μm时,生成的金刚石薄膜受到较大内应力而发生破裂；当钛过渡层厚度为25 μm时,金刚石薄膜质量较好,薄膜受一定内应力,但没有破裂；850℃左右保温热处理12h,铜原子与钛原子发生了扩散.
参考文献
| [1] | 田民波;刘德令.薄膜科学与技术手册(下册)[M].北京:机械工业出版社,1991:5-85. |
| [2] | 戴达煌;周克崧.金刚石薄膜沉积制备工艺与应用[M].北京:冶金工业出版社,2001:10-132. |
| [3] | 邱万奇,陈星婷,刘仲武,钟喜春,余红雅,曾德长.镶嵌结构界面金刚石涂层研究进展[J].真空科学与技术学报,2011(06):691-695. |
| [4] | BUSCH J V;DIMUKES J P.Trends and Market Perspectives for CVD Diamond[J].Diamond and Related Materials,1994(03):295-302. |
| [5] | VEDAWYAS M;SIVANANTHAN G;KUMAR Ashok .Texture Polycrystalline Diamond Films on Cu Metal Substrates by Hot Filament Chemical Vapor Deposition[J].Material Science and Engineering,2000,B78:16-21. |
| [6] | 魏秋平,王钰言,陈中,刘培植,余志明.W18Cr4V高速钢渗铬热处理对HFCVD金刚石膜生长的影响[J].中国有色金属学报,2011(07):1623-1631. |
| [7] | S.D.Wolter;D.-A.Borca-Tasciuc;G.Chen;N.Govindaraju;R.Collazo;F.Okazumi;J.T.Prater;Z.Sitar .Thermal conductivity of epitaxially textured diamond films[J].Diamond and Related Materials,2003(1):61-64. |
| [8] | Huang YS;Qiu W;Luo CP .Effect of molybdenum on diamond deposition and adhesion[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2005(1/2):20-25. |
| [9] | 葛志明.钛的二元系相图[M].北京:国防工业出版社,1977:35-45. |
| [10] | VEDAWYAS M;SIVANANTHAN G;KUMAR Ashok .Texture Polycrystalline Diamond Films on Cu Metal Substrates by Hot Filament Chemical Vapor Deposition[J].Material Science and Engineering,2000,B78:16-21. |
| [11] | P. Miranzo;M.I. Osendi;E. Garcia;A.J.S. Fernandes;V.A. Silva;F.M. Costa;R.F. Silva .Thermal conductivity enhancement in cutting tools by chemical vapor deposition diamond coating[J].Diamond and Related Materials,2002(3-6):703-707. |
| [12] | 邱万奇,潘建伟,刘仲武,余红雅,钟喜春,曾德长.电镀铬-金刚石复合过渡层提高金刚石膜/基结合力[J].无机材料学报,2012(02):205-208. |
| [13] | CHENG Tzu Kuo;CHII Ruey Lin;HOW Min Lien .Origin of the Residual Stress in CVD Diamond Films[J].THIN SOLID FILMS,1996,290:254-259. |
| [14] | Fortunato W;Chiquito AJ;Galzerani JC;Moro JR .Crystalline quality and phase purity of CVD diamond films studied by Raman spectroscopy[J].Journal of Materials Science,2007(17):7331-7336. |
| [15] | Bareiss JC;Hackl G;Popovska N;Rosiwal SM;Singer RF .CVD diamond coating of steel on a CVD-TiBN interlayer[J].Surface & Coatings Technology,2006(3/4):718-723. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%