镁合金表面沉积薄膜可以提高其耐蚀性,但现有的几种沉积方法得到的膜疏松、与基体结合力差,影响了其耐腐蚀性能.为此,采用磁控溅射法在AZ31镁合金表面制备了Al,Zr,Ti膜及其与SiN_x的复合薄膜.用扫描电镜、X射线衍射、XPS研究了金属膜及其与SiNi_x复合薄膜的晶体结构、表面形貌和化学成分.结果表明:所制备的SiN_x薄膜为非晶态的富N膜;Zr膜的耐腐蚀性最好,Al膜的保护性最差;Zr-SiN_x复合薄膜比AZ31镁合金的腐蚀电流密度降低了3个数量级,Ti-SiN_x复合薄膜在阳极极化区出现了钝化.SiN_x复合薄膜的耐腐蚀性优于AZ31镁合金和单一金属膜.
Thin films of Al, Zr, Ti and metal-SiN_x were deposited on AZ31 magnesium alloy by magnetron sputtering. The surface morphology, crystalline structure and chemical composition of the films were analyzed by means of scanning electron microscopy, X-ray diffraction and X-ray photoelectron spectroscopy. The corrosion resistance of the films was evaluated by using electrochemical methods. Results show that SiN_x films are amorphous and nitride-rich. Zr film had the best corrosion resistance, while Al film had the worst protective ability for Mg alloy substrate. Moreover, the corrosion current density of Zr-SiN. film was lower than that of Mg alloy substrate by three orders of magnitude, while Ti-SiN_x film was passivated in anodic polarization zone. In one word, SiN_x composite film showed better corrosion resistance than Mg alloy substrate and single component metallic films thereon as well.
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