采用强电流直流伸展电弧化学气相沉积(HCDCA CVD)技术在硬质合金微型工具表面沉积了SiC涂层作为过渡层,并在此基础之上制备了金刚石涂层.实验结果表明,采用HCDCA CVD技术在硬质合金表面制备的SiC纳米涂层连续、致密；此过渡层可有效地抑制硬质合金基体中Co的外向扩散,确保在不进行酸蚀去Co预处理的情况下,金刚石涂层对硬质合金基体具有良好的附着力.切削检测的结果表明,实验所制备的SiC过渡层/金刚石涂层的微型铣刀与未涂层微型铣刀相比,切削刃没有切削屑的粘结,且加工后的工件表面上毛刺较少.这些结果表明,SiC过渡层/金刚石涂层硬质合金微型工具将具有优异的加工性能.
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