阐述了飞秒激光与金属相互作用的机理和动力学过程,介绍了飞秒激光特有的精密加工特性,归纳了飞秒激光诱导金属微结构的研究进展.
参考文献
[1] | ShirkMD;Molian P A .Review of ultrashort pulsed laser ablation of materials[J].Journal of Laser Applications,1998,10(01):18. |
[2] | vonderLinderD;Sokolowski-Tinten K;Bialkowski J .Laser-solid interaction in the femtosecond time regime[J].Applied Surface Science,1997,109-110:1. |
[3] | AnisimovSI;Kapeliovich B L;Perelman T L .Electron emission from metal surfaces exposed to ultra-short laser pulses[J].Soviet Physics JETP,1974,39:375. |
[4] | FujimotoJG;Liu J M;IppenEP et al.Femtosecondlaser interaction with metallic tungsten and nonequilibrium electron and lattice temperature[J].Physical Review Letters,1984,53(19):1837. |
[5] | SchoenleinRW;Lin W Z;Fujimoto J G .Femtosecond studies of nonequilibrium processes in metals[J].Physical Review Letters,1987,58(16):1680. |
[6] | Elsayed-AliHE;Norris T B;Pessot M A et al.Time-resolved observation of electron-phonon relaxation in copper[J].Physical Review Letters,1987,58(12):1212. |
[7] | CorkumP;Brund F;Sherman N K .Thermal response of metals to ultrashort-pulse laser excitation[J].Physical Review Letters,1988,61(25):2886. |
[8] | DavisKM;Miura K;Naoki Sugimoto et al.Writing waveguides in glass with a femtosecond laser[J].Optics Letters,1996(21):1729. |
[9] | Glezer EN;Mazur E .Ultrafast-laser driven micro-explosions in transparent materials[J].Applied physics letters,1997(7):882-884. |
[10] | Miura, K;Qiu, JR;Inouye, H;Mitsuyu, T;Hirao, K .Photowritten optical waveguides in various glasses with ultrashort pulse laser[J].Applied Physics Letters,1997(23):3329-3331. |
[11] | Jianrong Qiu;Congshan Zhu;Takayuki Nakaya;Jinhai Si;Kazuo Kojima;Fumito Ogura;Kazuyuki Hirao .Space-selective valence state manipulation of transition metal ions inside glasses by a femtosecond laser[J].Applied physics letters,2001(22):3567-3569. |
[12] | Sun HB.;Juodkazis S.;Sun K.;Watanabe M.;Matsuo S.;Misawa H. Nishii J.;Xu Y. .Arbitrary-lattice photonic crystals created by multiphoton microfabrication[J].Optics Letters,2001(6):325-327. |
[13] | QiuJianrong;Shirai Mitsuru;Takayuki Nakaya et al.Space-selective precipitation of metal nanoparticles inside glasses[J].Applied Physics Letters,2002,81(16):3040. |
[14] | Pronko PP.;Du D.;Singh RK.;Dutta SK. .THERMOPHYSICAL EFFECTS IN LASER PROCESSING OF MATERIALS WITH PICOSECOND AND FEMTOSECOND PULSES[J].Journal of Applied Physics,1995(10):6233-6240. |
[15] | ChichkovN;Momma C;Nolte S et al.Picosecond and nanosecond laser ablation of solids[J].Applied Physics A:Materials Science and Processing,1996,63(02):109. |
[16] | MommaC;Nolte S;Chichkov B N et al.Precise laser abla tion with ultrashort pulses[J].Applied Surface Science,1997,109-110:15. |
[17] | Nolte S;Momma C;Jacobs H;Tunnermann A;Chichkov BN;Wellegehausen B;Welling H;PN LEBEDEV PHYS INST MOSCOW 117924 RUSSIA. .Ablation of metals by ultrashort laser pulses[J].Journal of the Optical Society of America, B. Optical Physics,1997(10):2716-2722. |
[18] | Gudde J.;Muller JG.;Matthias E.;Hohlfeld J. .Damage threshold dependence on electron-phonon coupling in Au and Ni films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1998(0):40-45. |
[19] | Wellershoff SS.;Gudde J.;Matthias E.;Hohlfeld J. .The role of electron-phonon coupling in femtosecond laser damage of metals[J].Applied physics, A. Materials science & processing,1999(Suppl.1):S99-S107. |
[20] | Furusawa K.;Kumagai H.;Midorikawa K.;Obara M.;Takahashi K. .Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti : sapphire laser[J].Applied physics, A. Materials science & processing,1999(Suppl.1):S359-S366. |
[21] | FalkovskyLA;Mishchenko E G .Electron-lattice kinetics of metals heated by ultrashort laser pulses[J].Journal of Experimental and Theoretical Physics,1999,88:84. |
[22] | Chen JK.;Beraun JE.;Grimes LE.;Tzou DY. .Modeling of femtosecond laser-induced non-equilibrium deformation in metal films[J].International Journal of Solids and Structures,2002(12):3199-3216. |
[23] | ShankCV;Ippen E P .Subpicosecond kilowatt pulses from a mode-locked cw dye laser[J].Applied Physics Letters,1974,24(08):373. |
[24] | Ruhman S.;Joly A.G. .Coherent molecular vibrational motion observed in the time domain through impulsive stimulated Raman scattering[J].IEEE Journal of Quantum Electronics: A Publication of the IEEE Quantum Electronics and Applications Society,1988(2):460-469. |
[25] | Momma C.;Nolte S.;Vonalvensleben F.;Tunnermann A. Welling H.;Wellegehausen B.;Chichkov BN. .SHORT-PULSE LASER ABLATION OF SOLID TARGETS[J].Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter,1996(1/2):134-142. |
[26] | Pronko PP.;Squier J.;Rudd JV.;Du D.;Mourou G.;Dutta SK. .MACHINING OF SUB-MICRON HOLES USING A FEMTOSECOND LASER AT 800 NM[J].Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter,1995(1/2):106-110. |
[27] | SimonP;Ihlemann J .Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser puls es[J].Applied Surface Science,1997,109-110:25. |
[28] | ZhuX;Villeneuve D M;Naumov A Yu et al.Experimental study of drilling sub-10 mm holes in thin metal foils with femtosecond laser pulses[J].Applied Surface Science,1999,152(3-4):138. |
[29] | Liu X.;Du D. .Laser ablation and micromachining with ultrashort laser pulses[J].IEEE Journal of Quantum Electronics: A Publication of the IEEE Quantum Electronics and Applications Society,1997(10):1706-1716. |
[30] | Momma C.;Kamlage G.;von Alvensleben F.;Tunnermann A.;Nolte S. .Beam delivery of femtosecond laser radiation by diffractive optical elements[J].Applied physics, A. Materials science & processing,1998(5):517-520. |
[31] | Venkatakrishnan K.;Tan B.;Sivakumar NR. .Sub-micron ablation of metallic thin film by femtosecond pulse laser[J].Optics & Laser Technology,2002(7):575-578. |
[32] | KamlageG;Bauer T;Ostendorf A et al.Deep drilling of metals by femtosecond laser pulses[J].Applied Physics A:Materials Science and Processing,2003,77(3-4):307. |
[33] | NakataY;Okada T;Maeda M .Lines of periodic hole struc tures produced by laser ablation using interfering femtosec ond lasers split by a transmission grating[J].Applied Physics A:Materials Science and Processing,2003,77(3-4):399. |
[34] | NakataY;Okada T;Maeda M .Fabrication of dot matrix,comb,and nanowire structures using laser ablation by in terfered femtosecond laser beams[J].Applied Physics Letters,2002,81(22):4239. |
[35] | NakataY;Okada T;Maeda M .Nano-sized hollow bump ar ray generated bu single femtosecond laser pulse[J].Japanese Journal of Applied Physics Part 2,2003,42:1452. |
[36] | LieermanK;Shani Y;Melnik I et al.Near-field optical photomask repair with a femtosecond laser[J].Journal of Microscopy,1999,194:537. |
[37] | NadeemHRizvi.Femtosecond laser micromachining: Cur rent status and applications[J].RIKEN Review,2003(50):107. |
[38] | DupontE;Zhu X;Chiu S et al.In situ repair of optoelec tronic devices with femtosecond laser pulses[J].Semiconductor Science and Technology,2000,15:15. |
[39] | LiuX;Takeda M;Ogawa H .[P].US Pat,6,433,303,2002-08-13. |
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