用离子注入技术实现了Al表面Fe、C元素的掺杂,并用XRD研究Fe、C掺杂对He离子注入Al表面晶格畸变的影响.结果发现,预先掺杂的Fe、C在Al表面的晶格畸变中扮演重要角色,且影响程度与掺杂剂量有关.随着预先掺杂Fe剂量的增大,Al表面晶格畸变量先减小后增加,表明小剂量的Fe掺杂有助于降低He离子注入引起的晶格畸变.C掺杂后能进一步降低预先掺杂Fe引起的晶格畸变,降低程度随C剂量的增加而增加.可见,小剂量的Fe和高剂量的C共掺杂能有效降低He离子注入后Al表面的品格畸变.
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