低温条件下在单晶硅表面沉积DLC膜和Si-DLC膜层，采用UMT-2微摩擦磨损实验机研究了两种膜层的摩擦磨损特性，借助拉曼光谱、X射线衍射仪及立体三维形貌仪分析了两种膜层的表面形貌和组成。使用扫描电子显微镜检测了两种膜层磨损后的表面形貌。结果表明两种膜层表面都非常平滑，属于纳米硬膜；两种膜层都具有良好的减摩托磨作用，其中DLC膜层的减磨性能好于Si-DLC膜，而Si-DLC膜的抗磨性能优于DLC膜。分析认为这是由于具有Si过渡层的DLC膜与硅基体的结合更为牢固造成的，但其同时促使DLC膜的减摩性能降低。
Two kind DLC films were deposited on single crystal silicon surfaces using the PECVD2D plasma chemical vapor deposition system at low temperature. The surface topography and composition of the two kind films were detected with Raman spectrum, X-ray diffractometer and tridimensional stereo pattern apparatus. The friction properties were investigated by an UMT-2 type friction tester. The worn surface topography was detected with scanning electronic microscope. The results show that the surface of the two kind films are very smoothing and they can be subsumption to nano-hard film. The two kind film both have well antifriction and re- sistance to wear performance. The antifriction performance of the DLC film is outgo Si-DLC film and the resist- ance to wear performance of the Si-DLC film is outgo DLC film. The reason is that the bonding force of the Si- DLC film with the silicon substrate is stronger because the exist of the Si transition layer, and the exist of the Si transition layer also induce the antifriction performance of the Si-DLC film reduce.
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