介绍了有机硅烷膜中掺杂阻隔剂和缓蚀剂等不同的掺杂改性方法.掺杂能够提高复合硅烷膜层的厚度和致密性,一定程度上改善膜层的组织结构,增强其腐蚀防护性能.
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