因晶体硅是间接带隙半导体材料,其较低的吸收系数限制了对近红外波段入射光的吸收.为此,引入金属有机化学气相沉积(MOCVD)技术制备的ZnO薄膜,并通过改变掺杂流量和沉积时间调节ZnO∶ B(BZO)薄膜的光学和电学性能.将BZO薄膜用于硅异质结(SHJ)太阳电池的背反射电极,相比于传统结构,电池的反射率和外部量子效率在近红外波段得到显著改善.为进一步解释外量子效率增加的原因,在四甲基氢氧化铵(TMAH)湿法制绒的硅衬底上沉积BZO薄膜,得到了新型微纳米嵌套结构,并对其光吸收进行了测试分析.
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