采用直流磁控溅射法在柔性Kapton基片上制备了三明治结构的FeCoSiB/Cu/FeCoSiB多层膜,研究了多层膜的交流阻抗随外加应力变化的规律.测试结果表明,三明治结构多层膜的阻抗随外加应力的增大而增大,应力阻抗效应随中间导电层厚度以及铁磁层厚度的增加而增强,同时应力阻抗效应也与测试频率密切相关.
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