综述了在等温、等压化学气相沉积(ICVI)工艺中前驱体种类、滞留时间(τ)、As/Vr比、前驱体分压、沉积温度以及H2在热解炭沉积中的作用对C/C复合材料快速均匀致密化的影响,重点讨论了前驱体滞留时间(τ)的精确控制对ICVI的影响.指出滞留时间(τ)不宜过长,否则会导致扩散控制.另外还特别强调As/Vr比控制着复杂的气相反应(均相反应)和表面反应(异相反应)之间的竞争过程,是调节其它参数的前提.
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