分析了金刚石薄膜热导率的声子导热机理,从金刚石薄膜晶体结构的角度总结了影响热导率的因素,例如晶界、晶内杂质、缺陷、晶粒尺寸、晶粒取向、同位素;从金刚石薄膜合成工艺角度探讨了影响金刚石薄膜热导率的因素,例如基底材料及预处理、合成温度、气源及添加气体(氧气、氮气)、工作压强、功率等.
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