An optical fiber pressure sensor has been developed for the measurement in human body. The sensing element is possessed of a membrane structure, which is fabricated by micromachining. The fabrication process includes anisotropic wet etching on the silicon wafer. For the transmitting source and signal light, a multimode optical fiber 50/125 μm (core/clad) in diameter was used. The intensity of the light reflected back into the fiber varies with the membrane deflection, which is a function of pressure. The deflection of the membrane by applied pressure can be mathematically described.
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