Wenjing Yao
材料科学技术(英文)
The liquid-solid transitions of (Co2Si+CoSi) and (CoSi+CoSi2) eutectic alloys were realized in drop tube and the rapid eutectic growth mechanism of intermetallic compounds was examined. The experimental and calculated results indicate that with increasing Co content, the intermetallic compound prefers nucleating primarily. The eutectic microstructures experience the transitions of `lamellar-anomalous-divorced' eutectic with undercooling. In undercooled state, the growth of CoSi intermetallic compound always lags behind others, and no matter how large the undercooling is, this intermetallic compound grows under the solutal diffusion control. The calculated coupled zone demonstrates that (Co2Si+CoSi) eutectic can form within certain undercooling regime, when the composition is in the range from 23.6% to 25.4% Si. And the calculated coupled zone of (CoSi+CoSi2) covers a composition range from 40.8% to 43.8% Si.
关键词:
Liquid-solid transition
Applied Physics a-Materials Science & Processing
Amorphous aluminate YAlO3 (YAO) thin films on n-type silicon wafers as gate dielectric layers of metal - oxide semiconductor devices are prepared by pulsed laser deposition. As a comparison, amorphous aluminate LaAlO3 (LAO) thin films are also prepared. The structural and electrical characterization shows that the as-prepared YAO films remain amorphous until 900 degrees C and the dielectric constant is similar to 14. The measured leakage current of less than 10(-3) A/cm(2) at a bias of V-G = 1.0 V for similar to 40-nm-thick YAO and LAO films obeys the Fowler Nordheim tunneling mechanism. It is revealed that the electrical property can be significantly affected by the oxygen pressure during deposition and post rapid thermal annealing, which may change the fixed negative charge density at the gate interface.
关键词:
hafnium oxide;si;stability;silicon;transition;dioxide;devices;hfo2