Wuzhu YAN
金属学报(英文版)
doi:10.1016/S1006-7191(08)60125-8
The flat cylindrical indentation tests with different sizes of punch radius were investigated using finite element method (FEM) aimed to reveal the effect of punch size on the indentation behavior of the film/substrate system. Based on the FEM results analysis, two methods was proposed to separate film's reduced Young's modulus from a film/substrate system. The first method was based on a new weight function that quantifies film's and substrate's contributions to the overall mechanical properties of the film/substrate system in the flat cylindrical indentation test. The second method, a numerical approach, including fitting and extrapolation procedures was put forward. Both of the results from the two methods showed a reasonable agreement with the one input FE model. At last, the effect of maximum indentation depth and the surface micro-roughness of the thin film on the reduced Young's modulus of the film/substrate system were discussed. The methods proposed in the present study provide some new conceptions on evaluating other properties of thin films, e.g. creep, for which a flat-ended punch is also employed.
关键词:
Indentation test
,
表观杨氏模量
,
压痕测试;压头尺寸效应;权重方程
白宣羽
,
汪渊
,
徐可为
稀有金属材料与工程
采用磁控溅射方法在Si(111)基片上沉积Cu-Zr/ZrN薄膜体系作为扩散阻挡层.通过比较Cu-Zr/ZrN薄膜体系和三元非晶(Mo,Ta,W)-Si-N的电阻率,同时比较Cu-Zr/ZrN薄膜体系和Ta,YaN的硬度,说明作为扩散阻挡层的材料的选取,应从整体性能上考虑,而不能仅仅考虑热稳定性等单一指标.
关键词:
非晶
,
电阻率
,
纳米压入
,
硬度