YU Zhenjiang
,
YANG Dequan
,
XIE Xie
,
YAN Rongxin
,
FAN Chuizhen
,
Lanzhou Institue of Physics
,
Ministry of Aeronautical Industry
,
Lanzhou
,
China
金属学报(英文版)
The carbon layers on implanted steel surface have been studied by means of Auger spectra. It is shown that the thickness of the carbon layer is proportional to the dose of implanted ions. By comparison with the results of friction and wear tests, the friction coefficient is smaller than 0.20 at the first part of the friction coefficient curve. It is considered that the graphitic carbon layer on the top of steel is helpful to reducing the surface friction coefficient of steel.
关键词:
nitrogen ion implantation
,
null
,
null
,
null
白宣羽
,
汪渊
,
徐可为
稀有金属材料与工程
采用磁控溅射方法在Si(111)基片上沉积Cu-Zr/ZrN薄膜体系作为扩散阻挡层.通过比较Cu-Zr/ZrN薄膜体系和三元非晶(Mo,Ta,W)-Si-N的电阻率,同时比较Cu-Zr/ZrN薄膜体系和Ta,YaN的硬度,说明作为扩散阻挡层的材料的选取,应从整体性能上考虑,而不能仅仅考虑热稳定性等单一指标.
关键词:
非晶
,
电阻率
,
纳米压入
,
硬度