材料期刊网

INVESTIGATION ON DEPOSITIONS AND HARDNESS CHARACTERISTICS OF a SiC:H FILMS

X.F.Rong and Z.Y.Qin College of Mechanical Engineering , Taiyuan University of Technology , Taiyuan 030024 , China

金属学报(英文版)

In this paper, a deposition feature of a SiC:H films deposited by a RF sputtering system and a effect on the hardness of the films with various deposition conditions are investigated, and the effects of the silicon on a C:H are studied. It follows from the results that the properties of hardness...

关键词: a SiC:H film , null , null