R.Cremer
,
D.Kurapov
,
C.Martinez
,
O.Kyrylov
,
D.Neuschütz
金属学报(英文版)
Compounds of the B-C-N system are very promising to produce superhard coatings with good tribological, chemical and thermal properties. Consequently, BCN films were prepared by plasma enhanced chemical vapor deposition (PECVD). The films were deposited from gaseous mixtures of BCl3-C2H4-N2-H2-Ar in ...
关键词:
boron carbonitride
,
null
,
null
,
null
,
null
R.Cremer
,
D.Neuschütz
金属学报(英文版)
The increasing complexity of modern functional materials leads to the demand of acost efficient tool for the development of new products. One possible approach to thisquestion is the adaptation of combinatorial methods to the specific requirements of ma-terials industry. These methods, originally de...
关键词:
combinatorial chemistry
,
null
,
null
,
null
O.Kyrylov
,
R.Cremer
,
D.Neuschütz
金属学报(英文版)
In the last years a variety of plasma sources have been developed for film depositionby plasma activated deposition techniques. In addition to RF- and DC-sources, pulsedplasma sources are gaining increased attention. This interest is driven by the wish ofdepositing coatings with superior properties ...
关键词:
alumina
,
null
,
null
,
null
