K.W. Richter
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H. Ipser
金属学报(英文版)
The development of well defined and thermally stable ohmic contacts for Ⅲ- Ⅴ semi-conductors like InSb and GaSb is still a challenging problem in semiconductor devicetechnology. As device processing usually includes the exposure to elevated tempera-tures, interface reactions often occur during metal...
关键词:
contact material
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