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Electrical Performance of Electron Irradiated SiGe HBT and Si BJT

Wentao HUANG , Jilin WANG , Zhinong LIU , Peiyi CHEN , Peihsin TSIEN , Xiangti MENG

材料科学技术(英文)

The change of electrical performances of 1 MeV electron irradiated silicon-germanium (SiGe) heterojunction bipolar transistor (HBT) and Si bipolar junction transistor (BJT) was studied. After electron irradiation, both the collector current IC and the base current IB changed a little, and the current gain βdecreased a little for SiGe HBT. The higher the electron irradiation fluence was, the lower the IC decreased. For conventional Si BJT, IC and IB increased as well as βdecreased much larger than SiGe HBT under the same fluence. The contribution of IB was more important to the degradation of βfor both SiGe HBT and Si BJT. It was shown that SiGe HBT had a larger anti-radiation threshold and better anti-radiation performance than Si BJT. The mechanism of electrical performance changes induced by irradiation was preliminarily discussed.

关键词: Electron irradiation , null , null , null

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