M.Oda
,
K.Setoguchi
,
E.Fuchita and C.Hayashi(UFP Division
,
Vacuum Metallurgical Co.
,
Ltd.
,
516 Yokota
,
Sanbu-cho
,
Sanbu-gun
,
Chiba-pref.
,
Japan 289-12)
材料科学技术（英文）
UFPs are formed using gas evaporation methods. In the gas evaporation methods, configuration of UFPs are controlled to form chain-like shape, complex, and isolated UFP. UFP films can be formed through the gas deposition method, where formed UFPs are ejected out of a nozzle and deposited on a substrate, forming patterns
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