Wenjie ZHANG
,
Shenglong ZHU
,
Ying LI
,
Fuhui WANG
材料科学技术（英文）
TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the <220> direction, but the films deposited for 2 and 3 h were amorphous. The transmittance and phot...
关键词:
TiO2 film
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