Baowei QIAO
,
Yunfeng LAI
,
Jie FENG
,
Yun LING
,
Yinyin LIN
,
TingAo TANG
,
Bingchu CAI
,
Bomy CHEN
材料科学技术（英文）
The amorphous Ge2Sb2Te5 film with stoichiometric compositions was deposited by co-sputtering of separate Ge, Sb, and Te targets on SiO2/Si (100) wafer in ultrahigh vacuum magnetron sputtering apparatus. The crystallization behavior of amorphous Ge2Sb2Te5 film was investigated by X-ray diffraction (X...
关键词:
Co-sputtering
,
null
,
null
,
null
,
null
