材料期刊网

GROWTH MECHANISM OF TiC WHISKERS PREMRED BY A MODIFIED CHEMICAL VAPOR DEPOSITION METHOD

J.S. Pan and Y. W. Yuan (Department of Materials Science and Engineering , Tsinghua Universityt Beijing 100084 , China)(Department of Materials Science and Engineering , Tsinghua Universityt Beijing 100084 , China)

金属学报(英文版)

High quality TiC whiskers have been prepared by a modified chemical vapor deposition (CVD) method using TiCl4 and CH4 as reactant gases and Ni as substrate. The deposition temperature and gas flow mies have ampreciable effect on the whisker growth.The whisker orientations and morphology are determined by X-my diffraction (XRD),scanning electron micmpmph (SEM) and transmission electron microgmph (TEM).In addition to the spherical tips, spiral growth microsteps and obvious terraces are observed at the tips and side faces of whiskers in the present eoperiment. The whiskers grow mostly along (100) direction. The whisker growth mechanism is discussed in detail.

关键词: TiC; whisker; chemical vapor deposition (CVD); growth mechanism