L.Chen
,
Z.Y.Liu
,
D.C.Zeng
,
W.Q.Qiu
,
Z.H.Yuan
,
S.S.Lin
,
H.J.Hou
金属学报(英文版)
DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition (VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardne...
关键词:
DLC films
,
null
,
null
