L.P. Shi
,
X.D. He
,
Y. Li
金属学报(英文版)
This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite
laminate. And several major influencing factors are presented and discussed. It was
found that residual gas pressure should be low enough to guarantee the unobstructed
transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the di®erent vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure
of the micro-layer laminates.
关键词:
micro-layer composite material
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