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Synthesis of High Purity SiC Powder for High-resistivity SiC Single Crystals Growth

Li WANG , Xiaobu HU , Xiangang XU

材料科学技术(英文)

High purity silicon carbide (SiC) powder was synthesized in-situ by chemical reaction between silicon and carbon powder. In order to ensure that the impurity concentration of the resulting SiC powder is suitable for high-resistivity SiC single crystal growth, the preparation technology of SiC powder...

关键词: Activated carbon , null , null , null , null

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