Z.J. Zhan
,
X.X. Ma
,
Y. Sun and L.F. Xia School of Materials Science and Engineering
,
Harbin Institute of Technology
,
Harbin 150001
,
China
金属学报(英文版)
Aluminum alloy 2024 has been implanted with nitrogen ions at various doses by plasma based ion implantation (PBII). The introduction of energetic ions caused structural change within the near surface region of the solid. The samples have been characterized by X ray Photoelectron Spectroscopy at various depths. The chemical states of Al and N were identified by deconvolution of the recorded XPS spectra. After plasma based ion implanted nitrogen into aluminum, not only the AlN precipitates but also supersaturated solution of nitrogen formed. The presence of aluminum in different chemical states corresponding to Al, AlN and Al 2O 3. The majority of nitrogen participates in the form of the supersaturated solution. With the increase of nitrogen dose, the amount of AlN precipitates increased.
关键词:
plasma based ion implantation
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