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EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION

YANG Dejun ZHOU Honghui LI Huiqin University of Science and Technology Beijing , Beijing , China professor , Department of Corrosion Engineering , University of Science and Technology Beijing , Beijing 100083 , China

金属学报(英文版)

Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy film of stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition is reported.X-ray diffraction analysis revealed that the microstructure of film was sequently changed from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous with increasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.

关键词: magnetron sputtering , null , null , null

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